| VALQUA No. |
Name / Description |
Application |
Size |
| (3DG) |
Rectangle
Gate Valve
Gate valve equipped with a single action seal mechanism that can
cope with back pressure. |
Used as a gate valve
to be positioned between chambers of liquid crystal production
equipment and other vacuum equipment (rectangle opening). Especially
suitable for large units such as liquid crystal equipment for
large substrates. It can also cope with the substrate size of
the 6th generation or later in case of liquid crystal equipment. |
It can cope with an
opening size of 600 mm wide or more |
| (3DU) |
Dynamic Bellows®
Cylinder
Rod seal cylinder with a drive seal made of Dynamic Bellows®
M Series that excels in cleanliness, corrosion resistance and
durability. |
Used in a drive inside
a chamber of semiconductor production equipment, liquid crystal
production equipment and other vacuum equipment. |
 |
| (3DU) |
Slide Shaft
Feeder using magnet coupling technology. The driving mechanism
may be selected depending on the application: manual, motor or
air cylinder (air pressure). |
Device that is ideal
for transfer operations (linear and rotation) of samples inside
a chamber of vacuum equipment and analytical instruments. |
Standard stroke
[Unit of measure: mm] |
| (3DU) |
Clean Screw
Bolt
Hexagon socket head screw bolt made of JIS B 1176 compliant stainless
steel (steel grade: A2) that is lapped by a special polishing
process. It has an air bleeding hole, releases less gas and eliminates
adhesion of fats on the surface. Its smooth surface roughness
also eliminates dragging. Nuts, spring washers and flat washers
are also available for clean room applications. |
Ideal for use in semiconductor
production equipment, liquid crystal production equipment and
other vacuum equipment and analytical instruments, especially
in a vacuum area (inside a chamber). |
Standard size
[Unit of measure: mm] |
| (3DU) |
Bellows Type
Vacuum Transfer
Mechanism
Bellows Type
Elevating Mechanism
Unit with a driving shaft of Dynamic Bellows® used to transfer
a sample inside a chamber horizontally or vertically under a completely
sealed state. |
Used to
transfer or position a sample or device in a chamber of semiconductor
production equipment and liquid crystal production equipment. |
Standard stroke
(1) Vacuum transfer mechanism: Up to 1,000mm max.
(2) Elevating mechanism: Up to 850mm max. |
| (3DU) |
Compact Linear
Feeder
Used to transfer or position a sample in a chamber of a relatively
small experimental unit or analytical instrument. |
Standard stroke
25mm, 50mm |
| (3DU) |
Compact Rotary
Feeder
Device to transfer rotary motion into vacuum equipment using angular
displacement and displacement perpendicular to the axis. |
Used in vacuum equipment,
analytical instruments, radiation light and beam shutters. |
|
