| Valqua No. |
Name |
Applications / Equipments |
| (3DW) |
Dynamic Bellows |
Vacuum drive seal and vacuum valve seal for silicone single crystal production
equipment (CZ and FZ techniques) |
Dry etching equipment,
Vacuum drive seal and vacuum valve seal for plasma etching equipment and reactive ion etching equipment |
| Vacuum drive seal and vacuum valve seal for ion implanters and diffusion furnaces |
Thin-film deposition systems
Vacuum drive seal and vacuum valve seal for vacuum deposition equipment, sputtering equipment and C.V.D.
equipment |
| (3DU) |
Polished surface products |
Reduction of out gas and particles generated from metal surfaces of vacuum equipment |
| 3640 |
Metal Hollow O-ring |
Gasket for vacuum seal of impurity implanter device and film forming
device |
| 3645 |
TRYPACK |
| 560 |
High Purity Copper Gasket |
Gasket for piping of vacuum equipment, particularly for bakable flange |
| 4640 |
Fluoro Rubber O-ring |
Elastomer seals for silicone single crystal pproduction system, epitaxial
system, electron beam exposure system, plasma related system, ion implanter, vacuum evaporation system, sputtering
system, cleaning equipment |
| AC4640 |
ARMOR CRYSTAL O-ring |
| F4640 |
FLID O-ring |
| FA4640 |
FLID ARMOR O-ring |
| SA4640 |
SPOQ ARMOR O-ring |
Elastomer seals for silicone single crystal pproduction system, epitaxial
system, electron beam exposure system, plasma related system, ion implanter, vacuum evaporation system, sputtering
system, cleaning equipment |
| 5640 |
Silicone Rubber O-ring |
(7BR163)
(7BR164)
(7BR166)
(7BR563)
(7BR564)
(7BR573) |
VALFLON Molded Vessel |
Vessel, tube, and piping materials, using chemical liquid or special
gas for cleaning process, etching device, oxidation, photolithography, diffusion, and ion implantation |
| (7FZ1) |
VALFLON Spray ball |
(7FH1)
(7FH3) |
VALFLON Heat Exchanger |
| (7FR12) |
VALFLON Sheet lined Vessel |
| 7042 |
VALFLON Lined Pipe |
| 7041 |
VALFLON Flexible hose
(with Wire Braid) |
|
VALFLON Pliable hose |
| 7803 |
VALFLON Expansion Joint |
