| Valqua No. |
Name |
Applications / Equipments |
| 4640 |
Fluoro Rubber O-ring |
Vacuum equipment, gasket for piping
Deposition apparatus
Sputtering equipment
Dry etching equipment
CVD equipment
Vacuum pumps
Vacuum valves
Ultra-high vacuum flange
Coupling |
| 3640 |
Metal Hollow O-ring |
| 3645 |
TRYPACK |
| 560 |
High Purity Copper Gasket |
| 4560 |
WILLSON SEAL |
For Rotary Shaft |
| (3DG) |
Rectangle Gate Valve |
Used as a gate valve to be positioned between chambers of liquid crystal production
equipment and other vacuum equipment (rectangle opening). Especially suitable for large units such as liquid
crystal equipment for large substrates. It can also cope with the substrate size of the 6th generation or
later in case of liquid crystal equipment. |
| (3DU) |
Dynamic Bellows Cylinder |
Used in drives located in chambers of semiconductor equipment, liquid crystal production
equipment and other vacuum equipment |
| (3DU) |
Slide Shaft |
Device that is ideal for transfer operations (linear and rotary) of samples inside
a chamber of vacuum equipment and analytical instruments. |
| (3DU) |
Clean Screw Bolt |
Ideal for use in semiconductor production equipment, liquid crystal production
equipment and other vacuum equipment and analytical instruments, especially in a vacuum area (inside a chamber). |
| (3DU) |
Bellows Type Vacuum Transfer Mechanism
Bellows Type Elevating Mechanism |
Used to transfer or position a sample or device in a chamber of semiconductor production
equipment and liquid crystal production equipment. |
| (3DU) |
Compact Linear Feeder |
Used to transfer or position a sample or device in a chamber of semiconductor production
equipment and liquid crystal production equipment. |
| (3DU) |
Compact Rotary Feeder |
Used in vacuum equipment, analytical instruments, radiation light and beam shutters. |
