| VALQUA No. |
Name / Description |
Application |
Size |
| 640 |
Synthetic
Rubber O-ring
Synthetic rubber molded into O-ring cross section. Colored type
is available. Low-friction lubricant rubber materials are also
available. |
Simple construction
and non-oriented sealing allow the 640 to be used as static or
dynamic packing/gasket for machinery under a wide pressure range.
|
<Reference
Standard>
• JIS B 2401
• AS 568B
• AN6227, 6230
• MS 28775
• ISO/R 1077, 1078
• JASO
 |
| (NRF640) |
NEW RUBBERFLON
O-ring
No.640 with surface modified for increased strength |
Low-friction surface
gives no adhesion with other parts or machine. O-rings can be
installed automatically and continuously. Used mainly as static
seal. |
<Reference
Standard>
• JIS B 2401
• AS 568B
• AN6227, 6230
• MS 28775
• ISO/R 1077, 1078 |
| 4640 |
Fluoro Rubber
O-ring
Fluoro rubber molded into O-ring cross section. Colored types
(white, brown) are also available. |
Seal for machinery
that needs heat, chemical or oil resistance. |
<Reference
Standard>
• JIS B 2401
• AS 568B
• ISO/R 1799, 1800
• NAS 1593, 1594, 1595, 1516  |
| (NRF4640) |
NEW RUBBERFLON
Fluoro Rubber O-ring
No.4640 with surface modified for increased strength |
Low-friction surface
offers no adhesion with other parts or machine. O-rings can be
installed automatically and continuously. Used mainly as static
seal. |
<Reference
Standard>
• JIS B 2401
• AS 568B
• ISO/R 1799, 1800
• NAS 1593, 1594, 1595, 1516 |
| H4640 |
Heat resistant
fluoro rubber O-ring
Heat resistant fluoro rubber ring formed with O-shaped cross-section
(Black). |
The heat resistant
fluoro rubber has significantly higher permanent compression set
characteristics than conventional general-purpose fluoro rubber
seal products. Its longer seal life promises an extended maintenance
cycle. |
<Reference
Standard>
• JIS B 2401
• AS 568B |
| AC4640 |
ARMOR CRYSTAL
O-ring
Armor Crystal molded into O-ring cross section (transparent).
Particle action grade |
No filler is used,
which makes the O-ring highly pure. Low adhesion to metal and
superior plasma-resistance allows the AC4640 to be used in dry
etching/ashing equipment and CVD equipment for semiconductor and
LCD equipment. Maximum temperature approx.
160 |
| F4640 |
FLID O-ring
Flid molded into O-ring cross section (black). Standard popular
grade |
Superior mechanical
properties allow the O-ring to be used for sealing vacuum gates
of semiconductor and LCD equipment, and for conveyor belt.
Maximum temperature approx.
200 |
| FA4640 |
FLID ARMOR
O-ring
Flid Armor molded into O-ring cross section (black). Special low-friction
grade |
Superior mechanical
properties and low adhesion to metal. Used mainly for sealing
vacuum gates of semiconductor or LCD equipment.
Maximum temperature approx.
200 |
| SA4640 |
SPOQ ARMOR
O-ring
Spoq Armor molded into O-ring cross section (white). Anti-plasma
grade |
Superior in purity,
plasma resistance, and low adhesion to quartz. Used in dry etching/ashing
equipment and CVD equipment for semiconductor and LCD equipment.
Maximum temperature approx.
200 |
| HA4640 |
HYREC ARMOR
O-ring
HYAREC ARMOR ring formed with O-shaped cross-section (transparent
amber). Plasma resistant grade. |
Excels in purity,
plasma resistance, heat resistance and adhesion resistance against
metal (for stationary part only). Used in dry etching, ashing
and CVD devices for semiconductor and liquid crystal equipment.
Standard maximum operating temperature :
220 |
| UA4640 |
ULTIC ARMOR
O-ring
Rings of ULTIC ARMOR formed with O-shaped cross-section (transparent
amber). Plasma resistant grade. |
Excels in purity,
plasma resistance, heat resistance and adhesion resistance against
metal. Used in dry etching, ashing and CVD devices for semiconductor
and liquid crystal equipment.
Standard maximum
service temperature :
220 |
| LA4640 |
LABE ARMOR
O-ring
LABE ARMOR ring formed with O-shaped cross-section (blue).
For O2 plasma resistant grade only. |
Excels in resistance
to O2 plasma and adhesion resistance against quartz. Used in ashing
devices for semiconductor and liquid crystal equipment.
Standard maximum service temperature :
200 |
| WD4640 |
ARCURY AD
O-ring
ARCURY AD ring formed with O-shaped cross-section (transparent
amber). For acid resistance applications. |
Excels in resistance
to acid solution and provides high purity due to lowest extraction
of metals and organics. Used in wafer and glass substrate cleaning
equipment, spin coaters, spin developers and chemical carrier
tank seals. |
| WL4640 |
ARCURY AL
O-ring
ARCURY AL ring formed with O-shaped cross-section (black). For
alkaline resistance applications. |
Excels in resistance
to alkaline solvents including ammonia for which conventional
fluoro rubber cannot be used. Used in wafer and glass substrate
cleaning equipment, spin coaters, spin developers and chemical
carrier tank seals. |
| WO4640 |
ARCURY SO
O-ring
ARCURY SO ring formed with O-shaped cross-section (white). For
resistance to ketone, ester and amine. |
Excels in resistance
to polar organic solvent including ketone, ester and amine. Used
in wafer and glass substrate cleaning equipment, spin coaters,
spin developers and chemical carrier tank seals. |
<Reference
Standard>
• JIS B 2401
• AS 568B |
| OZT4640 |
ARCURY OZT
O-ring
ARCURY OZT ring formed with O-shaped cross-section (transparent).
For resistance to ozone |
Excels in resistance
to ozone gas and water and provides high purity due to lowest
extraction of metals and organics. Used in ozone cleaning systems,
ozone generators and ozone decomposition systems. |
| OZW4640 |
ARCURY OZW
O-ring
ARCURY OZW ring formed with O-shaped cross-section (white). For
resistance to ozone. |
Excels in resistance
to ozone gas and water and provides higher heat resistance than
OZT. Used in ozone cleaning systems, ozone generators and ozone
decomposition systems. |
| VP4640 |
Fluoritz-SB
Fluoritz SB, a perfluoroelastomer, formed with O-shaped cross-section
(black). Extremely excellent resistance to chemicals. |
Used in areas requiring
high resistance to chemicals for semiconductor, liquid crystal,
chemical and electric/electronic industries. |
| VPH4640 |
Fluoritz-HR
Fluoritz HR, a perfluoroelastomer, formed with O-shaped cross-section
(black).
Extremely excellent resistance to chemicals as well as heat. |
Used in areas requiring
high thermal resistance for semiconductor and liquid crystal equipment
(PE-CVD, LP-CVD and diffusion furnace) and in automobile, chemical
and energy sectors. |
| 5640 |
Silicone Rubber
O-ring
Silicone rubber molded into O-ring cross section |
Used as static seals
under a wide temperature range |
<Reference
Standard>
• JIS B 2401
• AS 568B
• ISO/R 1799,1800
 |
| P9640 |
TOUGHRETHANE
O-ring
Urethane rubber molded into O-ring cross section |
Used mainly as high-pressure
seal |
|