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VALQUA No. Product Name Description Application Detail
H4640 Heat resistant fluoro rubber O-ring Heat resistant fluoro rubber ring formed with O-shaped cross-section (Black). The heat resistant fluoro rubber has significantly higher permanent compression set characteristics than conventional general-purpose fluoro rubber seal products. Its longer seal life promises an extended maintenance cycle. 詳細
HA4640 HYREC ARMOR O-ring HYAREC ARMOR ring formed with O-shaped cross-section (transparent amber). Plasma resistant grade. Excels in purity, plasma resistance, heat resistance and adhesion resistance against metal (for stationary part only). Used in dry etching, ashing and CVD devices for semiconductor and liquid crystal equipment.

Standard maximum operating temperature : 220℃

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