VALQUA, LTD.

O-ring

Detail:Detail Download:Download
VALQUA No. Product Name Description Application Detail
4640 Fluoro Rubber O-ring Static Application This product is formed by molding fluoro rubber into a ring shape with an O-shaped cross section. We also offer O-rings of various colors including white and brown. It is used as a seal for machinery that requires heat/chemical/oil resistance. 詳細 PDFリンク
4640 Fluoro Rubber O-ring Dynamic Application This product is formed by molding fluoro rubber into a ring shape with an O-shaped cross section. We also offer O-rings of various colors including white and brown. It is used as a seal for machinery that requires heat/chemical/oil resistance. 詳細 PDFリンク
5640 Silicone Rubber O-ring Static Application This product is formed by molding silicone rubber into a ring shape with an O-shaped cross section. It is used as a static application seal that requires a wide range of temperatures, from low to high. 詳細 PDFリンク
5640 Silicone Rubber O-ring Dynamic Application This product is formed by molding silicone rubber into a ring shape with an O-shaped cross section. It is used as a static application seal that requires a wide range of temperatures, from low to high. 詳細 PDFリンク
640 Synthetic Rubber O-ring Static Application This product is formed by molding synthetic rubber into a ring shape with an O-shaped cross section. We also offer low-friction lubricant rubber material. The structure is simple and the seal has no directionality, so it can be used under a wide range of pressures as a static application gasket or dynamic application packing for machinery. 詳細 PDFリンク
640 Synthetic Rubber O-ring Dynamic Application This product is formed by molding synthetic rubber into a ring shape with an O-shaped cross section. We also offer low-friction lubricant rubber material. The structure is simple and the seal has no directionality, so it can be used under a wide range of pressures as a static application gasket or dynamic application packing for machinery. 詳細 PDFリンク
AC4640 ARMOR CRYSTAL O-ring Armor Crystal molded into O-ring cross section (transparent). Particle action grade No filler is used, which makes the O-ring highly pure. Low adhesion to metal and superior plasma-resistance allows the AC4640 to be used in dry etching/ashing equipment and CVD equipment for semiconductor and LCD equipment.

Maximum temperature approx. 160℃
詳細 PDFリンク
C4640 CRYSTAL RUBBER A clear and colorless product in which CRYSTAL RUBBER is molded into a ring shape with an O-shaped cross section, for a grade that can deal with particles. With excellent purity (due to our own mixture design), non-adhesive characteristics, and plasma resistance against metals, it is used inside dry-etching/ashing systems or CVD systems (such as in semiconductors and LCD equipment), as well as with wafer and glass conveyance rollers. 詳細 PDFリンク
DC4640 DC156 A dark blue plasma resistant grade product in which DC156 is molded into a ring shape with an O-shaped cross section. With better plasma resistance than the ARMOR series, it is used inside dry-etching/ashing systems or CVD systems, such as in semiconductors and LCD equipment. 詳細 PDFリンク
DS4640 DS403 A black plasma resistant grade product in which DS403 is molded into a ring shape with an O-shaped cross section. With plasma resistance comparable to perfluoroelastomer, it is used inside dry-etching/ashing systems or CVD systems, such as in semiconductors and LCD equipment. 詳細 PDFリンク
F4640 FLID O-ring Flid molded into O-ring cross section (black). Standard popular grade Superior mechanical properties allow the O-ring to be used for sealing vacuum gates of semiconductor and LCD equipment, and for conveyor belt.

Maximum temperature approx. 200℃
詳細 PDFリンク
FA4640 FLID ARMOR O-ring Flid Armor molded into O-ring cross section (black). Special low-friction grade Superior mechanical properties and low adhesion to metal. Used mainly for sealing vacuum gates of semiconductor or LCD equipment.

Maximum temperature approx. 200℃
詳細 PDFリンク
H4640 Heat resistant fluoro rubber O-ring Heat resistant fluoro rubber ring formed with O-shaped cross-section (Black). The heat resistant fluoro rubber has significantly higher permanent compression set characteristics than conventional general-purpose fluoro rubber seal products. Its longer seal life promises an extended maintenance cycle. 詳細 PDFリンク
HA4640 HYREC ARMOR O-ring HYAREC ARMOR ring formed with O-shaped cross-section (transparent amber). Plasma resistant grade. Excels in purity, plasma resistance, heat resistance and adhesion resistance against metal (for stationary part only). Used in dry etching, ashing and CVD devices for semiconductor and liquid crystal equipment.

Standard maximum operating temperature : 220℃
詳細 PDFリンク
LA4640 LABE ARMOR O-ring LABE ARMOR ring formed with O-shaped cross-section (blue).
For O2 plasma resistant grade only.
Excels in resistance to O2 plasma and adhesion resistance against quartz. Used in ashing devices for semiconductor and liquid crystal equipment.

Standard maximum service temperature : 200℃
詳細 PDFリンク
MC4640 OPTIC ARMOR A clear and colorless product in which OPTIC ARMOR is molded into a ring shape with an O-shaped cross section, for a low discharged gas grade. It offers exceptional purity due to our own mixture design and packaging specification. It also has excellent non-adhesive characteristics against metals, and is used for exposure equipment, etc. that is averse to discharged gas. 詳細 PDFリンク
NRF4640 NEW RUBBERFLON Fluoro Rubber O-ring No.4640 with surface modified for increased strength Low-friction surface offers no adhesion with other parts or machine. O-rings can be installed automatically and continuously. Used mainly as static seal. 詳細 PDFリンク
NRF640 NEW RUBBERFLON O-ring No.640 with surface modified for increased strength Low-friction surface gives no adhesion with other parts or machine. O-rings can be installed automatically and continuously. Used mainly as static seal. 詳細 PDFリンク
OZT4640 ARCURY OZT O-ring ARCURY OZT ring formed with O-shaped cross-section (transparent). For resistance to ozone Excels in resistance to ozone gas and water and provides high purity due to lowest extraction of metals and organics. Used in ozone cleaning systems, ozone generators and ozone decomposition systems. 詳細 PDFリンク
OZW4640 ARCURY OZW O-ring ARCURY OZW ring formed with O-shaped cross-section (white). For resistance to ozone. Excels in resistance to ozone gas and water and provides higher heat resistance than OZT. Used in ozone cleaning systems, ozone generators and ozone decomposition systems. 詳細 PDFリンク
P9640 TOUGHRETHANE O-ring Urethane rubber molded into O-ring cross section Used mainly as high-pressure seal PDFリンク
SA4640 SPOQ ARMOR O-ring Spoq Armor molded into O-ring cross section (white). Anti-plasma grade Superior in purity, plasma resistance, and low adhesion to quartz. Used in dry etching/ashing equipment and CVD equipment for semiconductor and LCD equipment.

Maximum temperature approx.
200℃
詳細 PDFリンク
UA4640 ULTIC ARMOR O-ring Rings of ULTIC ARMOR formed with O-shaped cross-section (transparent amber). Plasma resistant grade. Excels in purity, plasma resistance, heat resistance and adhesion resistance against metal. Used in dry etching, ashing and CVD devices for semiconductor and liquid crystal equipment.

Standard maximum service temperature :
220℃
詳細 PDFリンク
UAF4640 ULTIC ARMOR-F This product is formed by molding ULTIC ARMOR-F into a ring shape with an O-shaped cross section. It has excellent purity, plasma resistance, heat-resisting properties, and non-adhesive characteristics against metals. It is used inside dry-etching/ashing systems or CVD systems in semiconductors and LCD equipment. 詳細 PDFリンク
VP4640 Fluoritz-SB Fluoritz SB, a perfluoroelastomer, formed with O-shaped cross-section (black). Extremely excellent resistance to chemicals. Used in areas requiring high resistance to chemicals for semiconductor, liquid crystal, chemical and electric/electronic industries. 詳細 PDFリンク
VPHS4640 FLUORITZ-HS This dark brown product, exclusively made for thermal diffusion processes in semiconductor manufacturing equipment, is formed by molding FLUORITZ-HS, a perfluoroelastomer material, into a ring shape with an O-shaped cross section. It has the best heat-resisting properties in the FLUORITZ series and also has excellent radical resistance, purity, and low distortion characteristics. It is used in the areas where heat-resisting properties are required within thermal diffusion devices of semiconductor manufacturing equipment. 詳細 PDFリンク
VPT4640 FLUORITZ-T20 This black product is formed by molding FLUORITZ-T20, a perfluoroelastomer material, into a ring shape with an O-shaped cross section. It maintains high radical resistance, and has excellent purity, low distortion characteristics, heat-resisting properties, and sealability for moving parts. It is used inside gate areas of dry-etching/ashing systems or CVD systems in semiconductors and LCD equipment that require high radical resistance. 詳細 PDFリンク
VPTR4640 FLUORITZ-TR This product is formed by molding FLUORITZ-TR, a perfluoroelastomer material, into a ring shape with an O-shaped cross section. It maintains high radical resistance, and has excellent purity, low distortion characteristics, and heat-resisting properties. It is used inside locations of dry-etching/ashing systems or CVD systems in semiconductors and LCD equipment that require high radical resistance. 詳細 PDFリンク
WD4640 ARCURY AD O-ring ARCURY AD ring formed with O-shaped cross-section (transparent amber). For acid resistance applications. Excels in resistance to acid solution and provides high purity due to lowest extraction of metals and organics. Used in wafer and glass substrate cleaning equipment, spin coaters, spin developers and chemical carrier tank seals. 詳細 PDFリンク
WL4640 ARCURY AL O-ring ARCURY AL ring formed with O-shaped cross-section (black). For alkaline resistance applications. Excels in resistance to alkaline solvents including ammonia for which conventional fluoro rubber cannot be used. Used in wafer and glass substrate cleaning equipment, spin coaters, spin developers and chemical carrier tank seals. 詳細 PDFリンク

In this site, in order to understand the usage situation and improve the service,
We use cookies. For more information, please see our Privacy Policy.