Semi-Conductor Processing

Valqua No.NameApplications / Equipments
(3DW)Dynamic BellowsVacuum drive seal and vacuum valve seal for silicone single crystal production equipment (CZ and FZ techniques)
Dry etching equipment,
Vacuum drive seal and vacuum valve seal for plasma etching equipment and reactive ion etching equipment
Vacuum drive seal and vacuum valve seal for ion implanters and diffusion furnaces
Thin-film deposition systems
Vacuum drive seal and vacuum valve seal for vacuum deposition equipment, sputtering equipment and C.V.D. equipment
3640Metal Hollow O-ringGasket for vacuum seal of impurity implanter device and film forming device
3645TRYPACK
560High Purity Copper GasketGasket for piping of vacuum equipment, particularly for bakable flange
4640Fluoro Rubber O-ringElastomer seals for silicone single crystal pproduction system, epitaxial system, electron beam exposure system, plasma related system, ion implanter, vacuum evaporation system, sputtering system, cleaning equipment
AC4640ARMOR CRYSTAL O-ring
F4640FLID O-ring
FA4640FLID ARMOR O-ring
SA4640SPOQ ARMOR O-ring
HA4640HYREC ARMOR O-ring
UA4640ULTIC ARMOR O-ring
LA4640LABE ARMOR O-ring
VP4640Fluoritz-SB
VPH4640Fluoritz-HR
VPTR4640FLUORITZ-TR
UB4060ULTIC ARMOR bonded gate seal
FB4060FLID bonded gate seal
5640Silicone Rubber O-ring
(7BR573)VALFLON Molded Vessel Vessel, tube, and piping materials, using chemical liquid or special gas for cleaning process, etching device, oxidation, photolithography, diffusion, and ion implantation
(7FZ1)VALFLON Spray ball
(7FH1)VALFLON Heat Exchanger
(7FH3)
7042VALFLON Lined Pipe
7041VALFLON Flexible hose
(with Wire Braid)
7046-1VALFLON Pliable hose
7046-2
7803VALFLON Expansion Joint

top page
top page