HYREC ARMOR O-ring
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| VALQUA No. | Product Name | Description | Application | Detail |
|---|---|---|---|---|
| HA4640 | HYREC ARMOR O-ring | HYAREC ARMOR ring formed with O-shaped cross-section (transparent amber). Plasma resistant grade. | Excels in purity, plasma resistance, heat resistance and adhesion resistance against metal (for stationary part only). Used in dry etching, ashing and CVD devices for semiconductor and liquid crystal equipment. Standard maximum operating temperature : 220℃ |
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