VALQUA, LTD.

LABE ARMOR O-ring

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VALQUA No. Product Name Description Application Detail
LA4640 LABE ARMOR O-ring LABE ARMOR ring formed with O-shaped cross-section (blue).
For O2 plasma resistant grade only.
Excels in resistance to O2 plasma and adhesion resistance against quartz. Used in ashing devices for semiconductor and liquid crystal equipment.

Standard maximum service temperature : 200℃
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