VALQUA, LTD.

ULTIC ARMOR O-ring

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VALQUA No. Product Name Description Application Detail
UA4640 ULTIC ARMOR O-ring Rings of ULTIC ARMOR formed with O-shaped cross-section (transparent amber). Plasma resistant grade. Excels in purity, plasma resistance, heat resistance and adhesion resistance against metal. Used in dry etching, ashing and CVD devices for semiconductor and liquid crystal equipment.

Standard maximum service temperature :
220℃
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