VALQUA, LTD.

ULTIC ARMOR-F

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VALQUA No. Product Name Description Application Detail
UAF4640 ULTIC ARMOR-F This product is formed by molding ULTIC ARMOR-F into a ring shape with an O-shaped cross section. It has excellent purity, plasma resistance, heat-resisting properties, and non-adhesive characteristics against metals. It is used inside dry-etching/ashing systems or CVD systems in semiconductors and LCD equipment. Detail PDF

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