Semi-Conductor Processing
| Valqua No. | Name | Applications / Equipments |
|---|---|---|
| （3DW） | Dynamic Bellows | Vacuum drive seal and vacuum valve seal for silicone single crystal production equipment (CZ and FZ techniques) |
| Dry etching equipment, Vacuum drive seal and vacuum valve seal for plasma etching equipment and reactive ion etching equipment |
||
| Vacuum drive seal and vacuum valve seal for ion implanters and diffusion furnaces | ||
| Thin-film deposition systems Vacuum drive seal and vacuum valve seal for vacuum deposition equipment, sputtering equipment and C.V.D. equipment |
||
| 3640 | Metal Hollow O-ring | Gasket for vacuum seal of impurity implanter device and film forming device |
| 3645 | TRYPACK | |
| 560 | High Purity Copper Gasket | Gasket for piping of vacuum equipment, particularly for bakable flange |
| 4640 | Fluoro Rubber O-ring | Elastomer seals for silicone single crystal pproduction system, epitaxial system, electron beam exposure system, plasma related system, ion implanter, vacuum evaporation system, sputtering system, cleaning equipment |
| AC4640 | ARMOR CRYSTAL O-ring | |
| F4640 | FLID O-ring | |
| FA4640 | FLID ARMOR O-ring | |
| SA4640 | SPOQ ARMOR O-ring | |
| HA4640 | HYREC ARMOR O-ring | |
| UA4640 | ULTIC ARMOR O-ring | |
| LA4640 | LABE ARMOR O-ring | |
| UB4060 | ULTIC ARMOR bonded gate seal | |
| FB4060 | FLID bonded gate seal | |
| 5640 | Silicone Rubber O-ring | |
| （7BR573） | VALFLON Molded Vessel | Vessel, tube, and piping materials, using chemical liquid or special gas for cleaning process, etching device, oxidation, photolithography, diffusion, and ion implantation |
| （7FZ1） | VALFLON Spray ball | |
| （7FH1） | VALFLON Heat Exchanger | |
| （7FH3） | ||
| 7042 | VALFLON Lined Pipe and Fittings | |
| 7041 | VALFLON Flexible hose (with Wire Braid) |
|
| 7046-1 | VALFLON Pliable hose | |
| 7046-2 | ||
| 7803 | VALFLON Expansion Joint | |
| 7FR52 | VALFLON Lined Tank | |
| PF2（7FC62A） | VALFLON（PFA）Lined Ball Valve | |
| PSC-20（7FC31） | VALFLON Lined Check Valve（Spring Type） |
